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RF MEMS Switch

RF MEMS Devices

MEMS, RF MEMS, MEMS Switch, MEMS Filter, MEMS Resonator, MEMS Tunable

Cassini Modular ATE for MEMS Testing by RI
Cassini 16
A Complete High Speed Automated
and Integrated Test Solution for:
  • MEMS
  • MEMS Switch
  • MEMS Filter
  • MEMS Resonator
  • MEMS Tunable Filter
  • 6 GHz, 12 GHz, 20 GHz, 40 GHz, 66 GHz and up!
  • Full S-Parameter Coverage
  • P1dB
  • Fixed Pout
  • IM3
  • Leakage Current
  • ACPR/ACLR
  • Efficiency
Recommended Tester Instrument Modules (TIMs) for MEMS testing
Multiple TIMs can be configured per tester for maximum flexibility, like upgrading to multi-site testing!

Device Power Module TIM
  • DC source and measurement for device test
  • Low speed static digital for managing test circuit configuration
  • Pulsed 3 A current source and measure
  • All dynamic features are synchronous
  • Supports multi-site test
  • 8x 250 mA 4 quadrant supplies
  • 4x 3A single quadrant pulsed supplies
  • 16 Low Speed Digital lines
  • 8 Voltage Measure Lines

6 GHz Source with Amp Attenuator
  • 100 MHz to 6 GHz (usable to 20 GHz)
  • -120 dBM to +22 dBm
  • 1 Hz Resolution

20 Ghz Receiver
  • 100 MHz to 6 GHz (usable from 70 MHz to 20 GHz)
  • < -100 dBm to +30 dBm
  • < 1 Hz Resolution

12 GHz Test Set TIM
  • Provides a fully calibrated microwave path between the DUT board and the tester.
  • Allows extension to multiple port structures via additional fixture.
  • 4 Full Performance RF Ports with
  • Full Vector Measurement up to 12 GHz
  • Supports External Synthesizer
  • Supports External Digital Modulated Synthesizer
  • Supports External Receiver

Custom TIM
Please contact RI for information on custom TIMs.
  • Cutting edge technology integrated with ATE capabilities

    • Multiple TIMs can be configured per tester for maximum flexibility.